CAS WR200 & WR300 Platen Heater

Aluminum 200 & 300 mm heated part, quick solution for wafer fabrication.

Starting at $2,802.00

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Product Specs

Features

  • 752°F (400°C) max temp
  • ±0.3% temp uniformity
  • Heater element cast-in
  • MGT insulated flexible lead wires

The CAS WR200 and WR300 platen heater design is ideal for prototype machine trials or engineering experiments as well as temporary repairs until custom heaters can be manufactured. CAS platen heaters provide a complete turnkey solution and are available in anodized finish, or in bare machined aluminum 356 with optional add-on features. The stock anodized cast aluminum platen heaters are complete, ready to install parts and are available for shipment within one business day. It is ultrasonic cleaned in DI water and IPA wiped prior to packaging.

Applications for CAS WR200 & WR300 Platen Heater

  • Semiconductor processing
  • Semiconductor research and development

CAS WR200 Platen Heater (200mm)

  • 9.00 in [228.6 mm] OD x .1.25 in [31.8 mm] thick platen
  • Power output is 1681 Watts (at 208V) to 2241 Watts (at 240V)
  • Exits back (non-working) surface at center
  • Additional holes on back (non-working) surface for sensor and mounting

CAS WR300 Platen Heater (300mm)

  • 13.78 in [350.0 mm] OD x .1.575 in [40.0 mm] thick platen
  • Power output is 3350 Watts (at 208V)
  • Exits back (non-working) surface at center
  • Additional holes on back (non-working) surface for sensor and mounting

This product can be used in the following applications: